发明授权
- 专利标题: Solid immersion lens optics assembly
- 专利标题(中): 固体浸没透镜光学组件
-
申请号: US12486509申请日: 2009-06-17
-
公开(公告)号: US08072699B2公开(公告)日: 2011-12-06
- 发明人: Lian Ser Koh , Choon Meng Chua , Wah Pheng Chua , Chee Hong Jacob Phang , Soon Huat Tan
- 申请人: Lian Ser Koh , Choon Meng Chua , Wah Pheng Chua , Chee Hong Jacob Phang , Soon Huat Tan
- 申请人地址: SG Singapore
- 专利权人: Semicaps Pte Ltd
- 当前专利权人: Semicaps Pte Ltd
- 当前专利权人地址: SG Singapore
- 代理机构: Volpe and Koenig P.C.
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B21/00
摘要:
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.
公开/授权文献
- US20100321678A1 SOLID IMMERSION LENS OPTICS ASSEMBLY 公开/授权日:2010-12-23
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |