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1.发明授权Method and system for measuring laser induced phenomena changes in a semiconductor device 有权用于测量半导体器件中的激光诱发现象变化的方法和系统公开(公告)号：US08278959B2
公开(公告)日：2012-10-02
申请号：US12372914
申请日：2009-02-18
IPC分类号： G01R31/02 , G01R31/302
CPC分类号： G01R31/311
摘要： A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises applying a biasing voltage from an emitter-follower circuit to a device under test (DUT); inducing said changes in the DUT; and measuring a voltage change in a collector portion of the emitter-follower circuit as a measure for said changes.
摘要翻译： 一种用于测量半导体器件中的电阻，电容和电感中的至少一个的激光感应现象变化的方法和系统。 该方法包括将来自射极跟随器电路的偏置电压施加到被测器件（DUT）; 引起DUT的变化; 并且测量发射极跟随器电路的集电极部分的电压变化作为所述变化的量度。
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公开(公告)号：US20100315617A1
公开(公告)日：2010-12-16
申请号：US12483432
申请日：2009-06-12
IPC分类号： G03B27/58
CPC分类号： G03B27/58
摘要： A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform; and a support structure disposed substantially within the cavity for supporting a portion of the wafer; wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.
摘要翻译： 晶片台和支撑晶片进行检查的方法。 晶片台包括用于支撑晶片的平台，使得晶片的背面悬挂在平台的空腔上方; 以及基本上设置在所述腔内的支撑结构，用于支撑所述晶片的一部分; 其中所述晶片台适于所述平台相对于所述支撑结构的相对运动，用于相对于探针对准所述晶片。
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公开(公告)号：US08436631B2
公开(公告)日：2013-05-07
申请号：US12483432
申请日：2009-06-12
IPC分类号： G01R31/00
CPC分类号： G03B27/58
摘要： A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform; and a support structure disposed substantially within the cavity for supporting a portion of the wafer; wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.
摘要翻译： 晶片台和支撑晶片进行检查的方法。 晶片台包括用于支撑晶片的平台，使得晶片的背面悬挂在平台的空腔上方; 以及基本上设置在所述腔内的支撑结构，用于支撑所述晶片的一部分; 其中所述晶片台适于所述平台相对于所述支撑结构的相对运动，用于相对于探针对准所述晶片。
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公开(公告)号：US08072699B2
公开(公告)日：2011-12-06
申请号：US12486509
申请日：2009-06-17
CPC分类号： G02B21/33
摘要： A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.
摘要翻译： 固体浸没透镜光学组件，用于在半导体晶片上的集成电路的探测和测试的测试台以及将SIL着陆在物体上的方法。 光学组件包括用于接收物镜的物镜壳体和用于安装SIL并适于连接到物镜壳体的固体浸没透镜（SIL）壳体; 其中所述SIL壳体的周壁包括适于为所述SIL提供偏置支撑的整体弹簧部分。
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5.发明申请METHOD AND SYSTEM FOR MEASURING LASER INDUCED PHENOMENA CHANGES IN A SEMICONDUCTOR DEVICE 有权用于测量半导体器件中的激光诱导电位变化的方法和系统公开(公告)号：US20100156451A1
公开(公告)日：2010-06-24
申请号：US12372914
申请日：2009-02-18
IPC分类号： G01R31/26
CPC分类号： G01R31/311
摘要： A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises applying a biasing voltage from an emitter-follower circuit to a device under test (DUT); inducing said changes in the DUT; and measuring a voltage change in a collector portion of the emitter-follower circuit as a measure for said changes.
摘要翻译： 一种用于测量半导体器件中的电阻，电容和电感中的至少一个的激光感应现象变化的方法和系统。 该方法包括将来自射极跟随器电路的偏置电压施加到被测器件（DUT）; 引起DUT的变化; 并且测量发射极跟随器电路的集电极部分的电压变化作为所述变化的量度。
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公开(公告)号：US20130241587A1
公开(公告)日：2013-09-19
申请号：US13887427
申请日：2013-05-06
IPC分类号： G01R1/04
CPC分类号： G01R1/04 , G01N21/9501 , G01N21/956 , G01R31/2893 , G01R31/311
摘要： A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform; and a support structure disposed substantially within the cavity for supporting a portion of the wafer; wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.
摘要翻译： 晶片台和支撑晶片进行检查的方法。 晶片台包括用于支撑晶片的平台，使得晶片的背面悬挂在平台的空腔上方; 以及基本上设置在所述腔内的支撑结构，用于支撑所述晶片的一部分; 其中所述晶片台适于所述平台相对于所述支撑结构的相对运动，用于相对于探针对准所述晶片。
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公开(公告)号：US20100321678A1
公开(公告)日：2010-12-23
申请号：US12486509
申请日：2009-06-17
IPC分类号： G01N21/956 , G02B7/02
CPC分类号： G02B21/33
摘要： A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.
摘要翻译： 固体浸没透镜光学组件，用于在半导体晶片上的集成电路的探测和测试的测试台以及将SIL着陆在物体上的方法。 光学组件包括用于接收物镜的物镜壳体和用于安装SIL并适于连接到物镜壳体的固体浸没透镜（SIL）壳体; 其中所述SIL壳体的周壁包括适于为所述SIL提供偏置支撑的整体弹簧部分。
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