发明授权
- 专利标题: Adjustable two dimensional lamellar grating
- 专利标题(中): 可调二维层状光栅
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申请号: US12483653申请日: 2009-06-12
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公开(公告)号: US08081319B2公开(公告)日: 2011-12-20
- 发明人: Malcolm C. Smith , Michael A. Butler , Erik Deutsch
- 申请人: Malcolm C. Smith , Michael A. Butler , Erik Deutsch
- 申请人地址: US MA Wilmington
- 专利权人: Ahura Scientific Inc.
- 当前专利权人: Ahura Scientific Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: Lando & Anastasi, LLP
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G02B26/08 ; G02B26/10 ; G02B26/12 ; G02B5/18 ; G02B27/44
摘要:
An adjustable two-dimensional lamellar grating system including a lamellar grating and a movable mirror disposed substantially parallel to one another, and an interferometer using the adjustable lamellar grating system. In one example, the lamellar grating includes a dielectric wafer having a dielectric wafer having a plurality of periodically spaced recesses formed therein, wherein the dielectric wafer has higher reflectivity at its surface facing the movable mirror than at a second opposing surface. In one example, the system also includes a mechanism for moving the mirror relative to the dielectric wafer.
公开/授权文献
- US20090257063A1 ADJUSTABLE TWO DIMENSIONAL LAMELLAR GRATING 公开/授权日:2009-10-15