发明授权
- 专利标题： Piezoelectric thin film resonator, filter, and communication apparatus
- 专利标题（中）： 压电薄膜谐振器，滤波器和通信装置
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申请号： US12397932申请日： 2009-03-04
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公开(公告)号： US08085115B2公开(公告)日： 2011-12-27
- 发明人: Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Masanori Ueda
- 申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Masanori Ueda
- 申请人地址： JP Tokyo
- 专利权人： Taiyo Yuden Co., Ltd
- 当前专利权人： Taiyo Yuden Co., Ltd
- 当前专利权人地址： JP Tokyo
- 代理机构： Arent Fox, LLP
- 优先权： JP2008-056261 20080306
- 主分类号： H03H9/54
- IPC分类号： H03H9/54 ; H03H9/13 ; H03H9/15
摘要：
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.
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