Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
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Application No.: US11742042Application Date: 2007-04-30
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Publication No.: US08085384B2Publication Date: 2011-12-27
- Inventor: Akinori Ohkubo , Akiyoshi Suzuki
- Applicant: Akinori Ohkubo , Akiyoshi Suzuki
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2006-127773 20060501
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G03B27/32 ; G03B27/42 ; G03B27/54 ; G03B27/72

Abstract:
An exposure apparatus that exposes a pattern of an original onto a substrate includes a condenser optical system configured to split light from a light source into plural rays, to condense the plural rays at different positions on the original, and to make a central part of each of the plural rays that illuminate the original darker than a periphery at the Fourier transform plane with respect to the original, and a projection optical system configured to project the pattern of the original onto the substrate.
Public/Granted literature
- US20070252968A1 EXPOSURE APPARATUS Public/Granted day:2007-11-01
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