发明授权
- 专利标题: Highly sensitive photo-sensing element and photo-sensing device using the same
- 专利标题(中): 高灵敏度感光元件和使用其的感光元件
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申请号: US12000402申请日: 2007-12-12
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公开(公告)号: US08097927B2公开(公告)日: 2012-01-17
- 发明人: Mitsuharu Tai , Toshio Miyazawa
- 申请人: Mitsuharu Tai , Toshio Miyazawa
- 申请人地址: JP Chiba
- 专利权人: Hitachi Displays, Ltd.
- 当前专利权人: Hitachi Displays, Ltd.
- 当前专利权人地址: JP Chiba
- 代理机构: Stites & Harbison PLLC
- 代理商 Juan Carlos A. Marquez, Esq.
- 优先权: JP2007-001303 20070109
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
The present invention provides an image display unit integrated with a photo-sensor, comprising a photo-sensing element with high sensitivity and low noise and a polycrystalline silicon TFT prepared at the same time on an insulating substrate using planer process. After a first electrode 11 and a second electrode 12 of the photo-sensing element are made of polycrystalline silicon film, a light receiving layer (photoelectric conversion layer) 13 of the photo-sensing element is prepared by amorphous silicon film on upper layer. In this case, a polycrystalline silicon TFT is prepared at the same time.
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