发明授权
- 专利标题: Photodetector isolation in image sensors
- 专利标题(中): 图像传感器中的光电检测器隔离
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申请号: US12966238申请日: 2010-12-13
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公开(公告)号: US08101450B1公开(公告)日: 2012-01-24
- 发明人: Hung Q. Doan , Eric G. Stevens , Robert M. Guidash
- 申请人: Hung Q. Doan , Eric G. Stevens , Robert M. Guidash
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/8238 ; H01L21/176
摘要:
Shallow trench isolation regions are disposed in an n-type silicon semiconductor layer laterally adjacent to a collection region of a photodetector and laterally adjacent to a charge-to-voltage conversion region. The shallow trench isolation regions each include a trench disposed in the silicon semiconductor layer and a first dielectric structure disposed along an interior bottom and sidewalls of each trench. A second dielectric structure is disposed over the pinning layer. The dielectric structures include a silicon nitride layer disposed over an oxide layer. An n-type isolation layer is disposed along only a portion of the exterior bottom of the trench and the exterior sidewall of the trench immediately adjacent to the photodetector. The n-type isolation layer is not disposed along the remaining portion of the bottom or the opposing exterior sidewall of the trench.
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