发明授权
- 专利标题: Bonded wafer structure and method of fabrication
- 专利标题(中): 粘合晶片结构和制造方法
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申请号: US12254536申请日: 2008-10-20
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公开(公告)号: US08102044B2公开(公告)日: 2012-01-24
- 发明人: Richard C. Ruby , James P. Roland , Frank S. Geefay
- 申请人: Richard C. Ruby , James P. Roland , Frank S. Geefay
- 申请人地址: SG Singapore
- 专利权人: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L23/12
- IPC分类号: H01L23/12 ; H01L21/00
摘要:
A method of packaging electronics comprises providing a first wafer and providing a second wafer. The method also comprises depositing a polymer material over a surface of the first wafer; and selectively removing a portion of the polymer from the first wafer to create a void in the polymer. The method also comprises placing the first wafer over the second wafer and in contact with the polymer; and curing the polymer to bond the first wafer to the second wafer. A bonded wafer structure is also described.
公开/授权文献
- US20100096745A1 BONDED WAFER STRUCTURE AND METHOD OF FABRICATION 公开/授权日:2010-04-22
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