发明授权
US08102044B2 Bonded wafer structure and method of fabrication 失效
粘合晶片结构和制造方法

Bonded wafer structure and method of fabrication
摘要:
A method of packaging electronics comprises providing a first wafer and providing a second wafer. The method also comprises depositing a polymer material over a surface of the first wafer; and selectively removing a portion of the polymer from the first wafer to create a void in the polymer. The method also comprises placing the first wafer over the second wafer and in contact with the polymer; and curing the polymer to bond the first wafer to the second wafer. A bonded wafer structure is also described.
公开/授权文献
信息查询
0/0