Invention Grant
- Patent Title: Bonded wafer structure and method of fabrication
- Patent Title (中): 粘合晶片结构和制造方法
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Application No.: US12254536Application Date: 2008-10-20
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Publication No.: US08102044B2Publication Date: 2012-01-24
- Inventor: Richard C. Ruby , James P. Roland , Frank S. Geefay
- Applicant: Richard C. Ruby , James P. Roland , Frank S. Geefay
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L23/12
- IPC: H01L23/12 ; H01L21/00

Abstract:
A method of packaging electronics comprises providing a first wafer and providing a second wafer. The method also comprises depositing a polymer material over a surface of the first wafer; and selectively removing a portion of the polymer from the first wafer to create a void in the polymer. The method also comprises placing the first wafer over the second wafer and in contact with the polymer; and curing the polymer to bond the first wafer to the second wafer. A bonded wafer structure is also described.
Public/Granted literature
- US20100096745A1 BONDED WAFER STRUCTURE AND METHOD OF FABRICATION Public/Granted day:2010-04-22
Information query
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