Invention Grant
- Patent Title: Multi-layer storage node, resistive random access memory device including a multi-layer storage node and methods of manufacturing the same
- Patent Title (中): 多层存储节点,包括多层存储节点的电阻随机存取存储器及其制造方法
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Application No.: US12314835Application Date: 2008-12-17
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Publication No.: US08106394B2Publication Date: 2012-01-31
- Inventor: Jung-hyun Lee , Sang-jun Choi , Hyung-jin Bae
- Applicant: Jung-hyun Lee , Sang-jun Choi , Hyung-jin Bae
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0001823 20080107
- Main IPC: H01L29/68
- IPC: H01L29/68

Abstract:
A multi-layer storage node, resistive random access memory device and methods of manufacturing the same are provided. The resistive random access memory device includes a switching structure and a storage node connected to the switching structure. The storage node includes a lower electrode, a first layer, a second layer, and an upper electrode that may be sequentially stacked. The first layer may be formed on the lower electrode and includes at least one of oxygen (O), sulfur (S), selenium (Se), tellurium (Te) and combinations thereof. The second layer may be formed on the first layer and includes at least one of copper (Cu), silver (Ag) and combinations thereof. The second layer may be formed of a material having an oxidizing power less than that of the first layer. The upper electrode may be formed on the second layer.
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