发明授权
US08106472B2 Image sensor with large-area, high-sensitivity and high-speed pixels
有权
具有大面积,高灵敏度和高速像素的图像传感器
- 专利标题: Image sensor with large-area, high-sensitivity and high-speed pixels
- 专利标题(中): 具有大面积,高灵敏度和高速像素的图像传感器
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申请号: US12702524申请日: 2010-02-09
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公开(公告)号: US08106472B2公开(公告)日: 2012-01-31
- 发明人: Rolf Kaufmann , Michael Lehmann , Peter Seitz
- 申请人: Rolf Kaufmann , Michael Lehmann , Peter Seitz
- 申请人地址: CH Zurich
- 专利权人: MESA Imaging AG
- 当前专利权人: MESA Imaging AG
- 当前专利权人地址: CH Zurich
- 代理机构: Houston Eliseeva, LLP
- 优先权: EP04007760 20040331
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
The pixel for use in an image sensor comprises a low-doped semiconductor substrate (A). On the substrate (A), an arrangement of a plurality of floating areas, e.g., floating gates (FG2-FG6), is provided. Neighboring floating gates are electrically isolated from each other yet capacitively coupled to each other. By applying a voltage (V2−V1) to two contact areas (FG1, FG7), a lateral steplike electric field is generated. Photogenerated charge carriers move along the electric-field lines to the point of highest potential energy, where a floating diffusion (D) accumulate the photocharges. The charges accumulated in the various pixels are sequentially read out with a suitable circuit known from image-sensor literature, such as a source follower or a charge amplifier with row and column select mechanisms. The pixel of offers at the same time a large sensing area, a high photocharge-detection sensitivity and a high response speed, without any static current consumption.
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