发明授权
- 专利标题： Microswitching device and method of manufacturing the same
- 专利标题（中）： 微动开关装置及其制造方法
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申请号： US11699378申请日： 2007-01-30
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公开(公告)号： US08106730B2公开(公告)日： 2012-01-31
- 发明人: Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
- 申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Fujitsu Patent Center
- 优先权： JP2006-022720 20060131
- 主分类号： H01H51/22
- IPC分类号： H01H51/22
摘要：
A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.