发明授权
- 专利标题: Semiconductor integrated circuit and manufacturing method therefor
- 专利标题(中): 半导体集成电路及其制造方法
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申请号: US12563231申请日: 2009-09-21
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公开(公告)号: US08107279B2公开(公告)日: 2012-01-31
- 发明人: Masanao Yamaoka , Kenichi Osada , Shigenobu Komatsu
- 申请人: Masanao Yamaoka , Kenichi Osada , Shigenobu Komatsu
- 申请人地址: JP Kawasaki-shi
- 专利权人: Renesas Electronics Corporation
- 当前专利权人: Renesas Electronics Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2006-339627 20061218
- 主分类号: G11C11/00
- IPC分类号: G11C11/00
摘要:
High manufacturing yield is realized and variations in threshold voltage of each MOS transistor in a CMOS.SRAM is compensated. Body bias voltages are applied to wells for MOS transistors of each SRAM memory cell in any active mode of an information holding operation, a write operation and a read operation of an SRAM. The threshold voltages of PMOS and NMOS transistors of the SRAM are first measured. Control information is respectively programmed into control memories according to the results of determination. The levels of the body bias voltages are adjusted based on the programs so that variations in the threshold voltages of the MOS transistors of the CMOS.SRAM are controlled to a predetermined error span. A body bias voltage corresponding to a reverse body bias or an extremely shallow forward body bias is applied to a substrate for the MOS transistors with an operating voltage applied to the source of each MOS transistor.
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