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US08108942B2 Probe microscope 失效
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Probe microscope
摘要:
A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.
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