发明授权
- 专利标题: Probe microscope
- 专利标题(中): 探头显微镜
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申请号: US12699321申请日: 2010-02-03
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公开(公告)号: US08108942B2公开(公告)日: 2012-01-31
- 发明人: Yoshimasa Suzuki , Kazuhiko Kawasaki , Satoshi Koga
- 申请人: Yoshimasa Suzuki , Kazuhiko Kawasaki , Satoshi Koga
- 申请人地址: JP Kawasaki-shi
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2009-023556 20090204
- 主分类号: G01N12/16
- IPC分类号: G01N12/16 ; G01Q20/02 ; G01B7/34
摘要:
A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.
公开/授权文献
- US20100199393A1 PROBE MICROSCOPE 公开/授权日:2010-08-05
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