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公开(公告)号：US20080047335A1
公开(公告)日：2008-02-28
申请号：US11892365
申请日：2007-08-22
CPC分类号： G01Q20/02
摘要： A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.
摘要翻译： 一种测量装置，包括：在测量期间相对于工件保持固定位置和取向的参考构件; 用于根据工件表面的不平坦度向上和向下移动来扫描工件的表面的触针; 用于测量触针的特定部分相对于参考构件的位移的位移计; 以及用于使所述触针沿着所述表面扫描所述工件的扫描仪; 其中，即使在扫描仪的操作期间，参考构件相对于工件的固定位置和取向也不改变; 相对于参考构件测量触针的特定部分的上下移位; 根据测量头的特定部位的位移来检测工件的精细形状。
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公开(公告)号：US08108942B2
公开(公告)日：2012-01-31
申请号：US12699321
申请日：2010-02-03
CPC分类号： G01Q20/02
摘要： A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.
摘要翻译： 探针显微镜包括具有探针的悬臂，位移检测光学系统，观察光学系统，物镜和平行玻璃。 位移检测光学系统包括第一光源和光检测元件。 观察光学系统包括第二光源，图像形成透镜和照相机。 物镜设置在悬臂与第一和第二光源之间，并且通常由位移检测光学系统和观察光学系统使用。 平行玻璃能够在悬臂和物镜之间自由地插入和缩回以调节物镜的焦点。
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公开(公告)号：US07681439B2
公开(公告)日：2010-03-23
申请号：US11892365
申请日：2007-08-22
IPC分类号： G01B21/30
CPC分类号： G01Q20/02
摘要： A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.
摘要翻译： 一种测量装置，包括：在测量期间相对于工件保持固定位置和取向的参考构件; 用于根据工件表面的不平坦度向上和向下移动来扫描工件的表面的触针; 用于测量触针的特定部分相对于参考构件的位移的位移计; 以及用于使所述触针沿着所述表面扫描所述工件的扫描仪; 其中，即使在扫描仪的操作期间，参考构件相对于工件的固定位置和取向也不改变; 相对于参考构件测量触针的特定部分的上下移位; 根据测量头的特定部位的位移来检测工件的精细形状。
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公开(公告)号：US08314940B2
公开(公告)日：2012-11-20
申请号：US12831651
申请日：2010-07-07
IPC分类号： G01B11/24
CPC分类号： G01B9/02027 , G01B9/02007 , G01B2290/45 , G01Q20/02
摘要： A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detecting section that detects displacement of the cantilever. The second displacement detection optical system includes a second light source and a second displacement detecting section that detects displacement of the object. The object lens is provided between the cantilever and the first light source and between the cantilever and the second light source. The object lens has a focal position for the light that is emitted from the first light source and has a first wavelength at the position of the cantilever and has a focal position for the light that is emitted from the second light source and has a second wavelength at the position of the object.
摘要翻译： 探针显微镜包括具有用于与物体接触的探针的悬臂，第一和第二位移检测光学系统以及物镜。 第一位移检测光学系统包括检测悬臂的位移的第一光源和第一位移检测部。 第二位移检测光学系统包括第二光源和检测物体的位移的第二位移检测部。 物镜设置在悬臂与第一光源之间以及悬臂与第二光源之间。 物镜具有用于从第一光源发出的光的焦点位置，并且在悬臂的位置处具有第一波长，并且具有用于从第二光源发射的光的焦点位置，并具有第二波长 在对象的位置。
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公开(公告)号：US20090021747A1
公开(公告)日：2009-01-22
申请号：US12219285
申请日：2008-07-18
IPC分类号： G12B21/08
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q60/32
摘要： A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.
摘要翻译： 一种形状测量装置，包括用于在被测量表面上扫描同时上下振动的探针; 微振动发生部，用于上下振动探头; 垂直运动控制部分，用于上下移动探头以保持测量表面与探头之间的恒定的接触力或恒定的距离; 扫描部，用于使用所述探针扫描待测量的表面; 用于测量探头的垂直位移并输出探针位移信号的位移传感器; 以及信号处理部分，用于从探头位移信号的高频分量获得关于接触力或待测量表面与探针之间的距离的信息，并且用于从探测位移信号的高频分量获得关于待测量表面的轮廓的信息 扫描要测量的表面时获得的信号的低频分量，使得距离或接触力保持恒定。
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公开(公告)号：US07907288B2
公开(公告)日：2011-03-15
申请号：US12219285
申请日：2008-07-18
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q60/32
摘要： A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.
摘要翻译： 一种形状测量装置，包括用于在被测量表面上扫描同时上下振动的探针; 微振动发生部，用于上下振动探头; 垂直运动控制部分，用于上下移动探头以保持测量表面与探头之间的恒定的接触力或恒定的距离; 扫描部，用于使用所述探针扫描待测量的表面; 用于测量探头的垂直位移并输出探针位移信号的位移传感器; 以及信号处理部分，用于从探头位移信号的高频分量获得关于接触力或待测量表面与探针之间的距离的信息，并且用于从探测位移信号的高频分量获得关于待测量表面的轮廓的信息 扫描要测量的表面时获得的信号的低频分量，使得距离或接触力保持恒定。
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公开(公告)号：US20110007324A1
公开(公告)日：2011-01-13
申请号：US12831651
申请日：2010-07-07
IPC分类号： G01B11/24
CPC分类号： G01B9/02027 , G01B9/02007 , G01B2290/45 , G01Q20/02
摘要： A probe microscope includes a cantilever having a probe for contact with an object, first and second displacement detection optical systems, and an object lens. The first displacement detection optical system includes a first light source and a first displacement detecting section that detects displacement of the cantilever. The second displacement detection optical system includes a second light source and a second displacement detecting section that detects displacement of the object. The object lens is provided between the cantilever and the first light source and between the cantilever and the second light source. The object lens has a focal position for the light that is emitted from the first light source and has a first wavelength at the position of the cantilever and has a focal position for the light that is emitted from the second light source and has a second wavelength at the position of the object.
摘要翻译： 探针显微镜包括具有用于与物体接触的探针的悬臂，第一和第二位移检测光学系统以及物镜。 第一位移检测光学系统包括检测悬臂的位移的第一光源和第一位移检测部。 第二位移检测光学系统包括第二光源和检测物体的位移的第二位移检测部。 物镜设置在悬臂与第一光源之间以及悬臂与第二光源之间。 物镜具有用于从第一光源发出的光的焦点位置，并且在悬臂的位置处具有第一波长，并且具有用于从第二光源发射的光的焦点位置，并具有第二波长 在对象的位置。
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公开(公告)号：US20100199393A1
公开(公告)日：2010-08-05
申请号：US12699321
申请日：2010-02-03
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02
摘要： A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.
摘要翻译： 探针显微镜包括具有探针的悬臂，位移检测光学系统，观察光学系统，物镜和平行玻璃。 位移检测光学系统包括第一光源和光检测元件。 观察光学系统包括第二光源，图像形成透镜和照相机。 物镜设置在悬臂与第一和第二光源之间，并且通常由位移检测光学系统和观察光学系统使用。 平行玻璃能够在悬臂和物镜之间自由地插入和缩回以调节物镜的焦点。
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公开(公告)号：US07511827B2
公开(公告)日：2009-03-31
申请号：US11411809
申请日：2006-04-27
IPC分类号： G01B11/02
CPC分类号： G01B9/0201 , G01B9/02004 , G01B9/02072 , G01B9/0209 , G01B11/2441 , G01B2290/45 , G01B2290/70
摘要： An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through phase shifting optical members. A plurality of interference fringe images formed by the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes and the amounts of phase shift of the interference fringes formed by the plurality of split lights are calculated, based on interference fringe intensities of the imaged interference fringes, which are obtained by disposing a calibrating substrate instead of the measuring object varying the wavelength of the emitted light to plural values, and operating the imaging unit to capture a plurality of images of interference fringes obtained by the split lights.
摘要翻译： 干涉仪包括波长可变光源。 合成参考光和测量光，并将合成光分成多个分光。 通过相移光学部件在分光灯之间提供一定的相位差。 在成像单元处捕获由相移分裂光形成的多个干涉条纹图像。 基于成像干涉条纹的干涉条纹强度，计算由多个分裂光形成的干涉条纹的偏移，幅度和相移量，其通过设置校准基板而不是改变波长的测量对象而获得 发射的光到多个值，并且操作成像单元以捕获通过分光获得的干涉条纹的多个图像。
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公开(公告)号：US20060262320A1
公开(公告)日：2006-11-23
申请号：US11433485
申请日：2006-05-15
申请人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
发明人： Kazuhiko Kawasaki , Yoshimasa Suzuki , David Sesko
IPC分类号： G01B9/02
CPC分类号： G01B9/02048 , G01B9/02004 , G01B9/02081 , G01B2290/45 , G01B2290/70
摘要： A wavelength-variable light source is configured to emit a light with a wavelength (λ), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.
摘要翻译： 波长可变光源被配置为发射波长（λ）的光，其在扫描宽度（Deltalambda）内是可变的。 干涉仪具有相干长度（DeltaL），其可以从（Deltalambda）和（λ）确定。 控制器确定扫描宽度（Deltalambda）的合适幅度，而CCD照相机在曝光时间（Te）中拍摄条纹图像，曝光时间（Te）设置为比波长扫描时间长。
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