发明授权
- 专利标题： Constant force mechanical scribers and methods for using same in semiconductor processing applications
- 专利标题（中）： 恒力机械刻划机及其在半导体加工应用中的使用方法
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申请号： US13014286申请日： 2011-01-26
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公开(公告)号： US08109004B2公开(公告)日： 2012-02-07
- 发明人: Alex Shenderovich , Boris Djurovic , Daniel Liu , Wen Chang , Benyamin Buller , Erel Milshtein
- 申请人： Alex Shenderovich , Boris Djurovic , Daniel Liu , Wen Chang , Benyamin Buller , Erel Milshtein
- 申请人地址： US CA Fremont
- 专利权人： Solyndra LLC
- 当前专利权人： Solyndra LLC
- 当前专利权人地址： US CA Fremont
- 代理机构： Morgan Lewis & Bockius LLP
- 代理商 Brett Lovejoy
- 主分类号： B43L13/00
- IPC分类号： B43L13/00
摘要：
A scribing system comprising a mounting mechanism, stylus, and force generating mechanism is provided. The mounting mechanism is configured to rotate an elongated object in such a manner that the object is subjected to a bow effect wherein a middle portion of the object bends relative to the end portions of the object. The stylus is for scribing the object at a position x along the long dimension of the object while the mounting mechanism rotates the object. The force generating mechanism is connected to the stylus so that the stylus applies the same constant force to the elongated object regardless of the position x along the long dimension of the object that the stylus is positioned, while the mounting mechanism rotates the object and thereby subjects the object to the bow effect, thereby scribing the object.
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