发明授权
- 专利标题: Conductivity measuring apparatus and conductivity measuring method
- 专利标题(中): 电导率测量仪和电导率测量方法
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申请号: US12378181申请日: 2009-02-11
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公开(公告)号: US08111079B2公开(公告)日: 2012-02-07
- 发明人: Masatoshi Yasutake , Takakazu Fukuchi
- 申请人: Masatoshi Yasutake , Takakazu Fukuchi
- 申请人地址: JP
- 专利权人: SII NanoTechnology Inc.
- 当前专利权人: SII NanoTechnology Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2008-033291 20080214
- 主分类号: G01R27/08
- IPC分类号: G01R27/08
摘要:
A conductivity measuring apparatus includes a probe base having a pair of electrodes disposed on respective opposite surfaces of a portion of the probe base. Observing and grasping probes are supported by the probe base in a cantilever state and are arranged adjancent to and spaced apart from one another by a predetermined distance. The grasping probe has a pair of electrodes disposed on respective opposite surfaces of a portion of the grasping probe confronting the portion of the probe base. A voltage apparatus applies a voltage between the pairs of electrodes on the probe base and the grasping probe to adjust the predetermined distance between the grasping and observing probes. A movement mechanism moves a sample base and the observing and grasping probes relative to each other to bring conductive tips of the observing and grasping probes into contact with respective contact points on a sample supported on the sample base. A measurement apparatus measures a conductivity between the contact points on the sample on the basis of a current flow generated between the conductive tips of the observing and grasping probes.
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