Invention Grant
- Patent Title: Conductivity measuring apparatus and conductivity measuring method
- Patent Title (中): 电导率测量仪和电导率测量方法
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Application No.: US12378181Application Date: 2009-02-11
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Publication No.: US08111079B2Publication Date: 2012-02-07
- Inventor: Masatoshi Yasutake , Takakazu Fukuchi
- Applicant: Masatoshi Yasutake , Takakazu Fukuchi
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2008-033291 20080214
- Main IPC: G01R27/08
- IPC: G01R27/08

Abstract:
A conductivity measuring apparatus includes a probe base having a pair of electrodes disposed on respective opposite surfaces of a portion of the probe base. Observing and grasping probes are supported by the probe base in a cantilever state and are arranged adjancent to and spaced apart from one another by a predetermined distance. The grasping probe has a pair of electrodes disposed on respective opposite surfaces of a portion of the grasping probe confronting the portion of the probe base. A voltage apparatus applies a voltage between the pairs of electrodes on the probe base and the grasping probe to adjust the predetermined distance between the grasping and observing probes. A movement mechanism moves a sample base and the observing and grasping probes relative to each other to bring conductive tips of the observing and grasping probes into contact with respective contact points on a sample supported on the sample base. A measurement apparatus measures a conductivity between the contact points on the sample on the basis of a current flow generated between the conductive tips of the observing and grasping probes.
Public/Granted literature
- US20090206855A1 Conductivity measuring apparatus and conductivity measuring method Public/Granted day:2009-08-20
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