发明授权
- 专利标题： MEMS device having a movable electrode
- 专利标题（中）： 具有可移动电极的MEMS器件
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申请号： US13170628申请日： 2011-06-28
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公开(公告)号： US08115266B2公开(公告)日： 2012-02-14
- 发明人: Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
- 申请人： Toru Watanabe , Akira Sato , Shogo Inaba , Takeshi Mori
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2006-289063 20061024; JP2007-184020 20070713
- 主分类号： H01L27/14
- IPC分类号： H01L27/14 ; H01L29/82 ; H01L29/84 ; H01L23/48
摘要：
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.
公开/授权文献
- US20110254110A1 MEMS DEVICE HAVING A MOVABLE ELECTRODE 公开/授权日：2011-10-20
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