Invention Grant
- Patent Title: Die-to-robot alignment for die-to-substrate bonding
- Patent Title (中): 用于管芯到衬底接合的模具对机器人对准
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Application No.: US12248204Application Date: 2008-10-09
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Publication No.: US08123881B2Publication Date: 2012-02-28
- Inventor: Damon K. Cox , Todd J. Egan , Michael X. Yang , Jeffrey C. Hudgens
- Applicant: Damon K. Cox , Todd J. Egan , Michael X. Yang , Jeffrey C. Hudgens
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: B32B37/00
- IPC: B32B37/00

Abstract:
A method, a system and a computer readable medium having a set of instructions stored thereon for die-to-robot alignment for die-to-substrate bonding are described. First, a robot is aligned with a substrate to provide a pre-aligned robot. Next, a die is aligned with the pre-aligned robot to provide a robot-aligned die. Finally, the robot-aligned die is bonded to a region of the substrate. The substrate is held stationary immediately following the aligning of the robot with the substrate and at least until the robot-aligned die is bonded to the region of the substrate.
Public/Granted literature
- US20090126851A1 DIE-TO-ROBOT ALIGNMENT FOR DIE-TO-SUBSTRATE BONDING Public/Granted day:2009-05-21
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