Invention Grant
- Patent Title: Plasma reactor having multiple antenna structure
- Patent Title (中): 等离子体反应器具有多个天线结构
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Application No.: US11995214Application Date: 2006-07-06
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Publication No.: US08123903B2Publication Date: 2012-02-28
- Inventor: Weon-Mook Lee
- Applicant: Weon-Mook Lee
- Applicant Address: KR Suwon
- Assignee: DMS Co., Ltd.
- Current Assignee: DMS Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: Gifford, Krass, Sprinkle, Anderson & Citkowski, P.C.
- Priority: KR10-2005-0065381 20050719
- International Application: PCT/KR2006/002643 WO 20060706
- International Announcement: WO2007/011121 WO 20070125
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306

Abstract:
A plasma reactor includes a chamber in which a wafer is treated by a plasma reaction, the chamber being provided at an upper portion with a cylindrical dielectric window, a multiple antenna structure disposed on upper and lower portions of the dielectric window to generate RF magnetic field and apply the RF magnetic field inside the chamber through the dielectric window, thereby generating RF electric field, and an RF electric power supply unit for allowing for a time variation of the magnetic field of the multiple antenna structure.
Public/Granted literature
- US20080210378A1 Plasma Reactor Having Multiple Antenna Structure Public/Granted day:2008-09-04
Information query
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