Invention Grant
- Patent Title: Sputtering target with bonding layer of varying thickness under target material
- Patent Title (中): 在目标材料下用不同厚度的粘结层溅射靶
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Application No.: US11229840Application Date: 2005-09-20
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Publication No.: US08123919B2Publication Date: 2012-02-28
- Inventor: Raymond M. Mayer , Yiwei Lu
- Applicant: Raymond M. Mayer , Yiwei Lu
- Applicant Address: US MI Auburn Hills
- Assignee: Guardian Industries Corp.
- Current Assignee: Guardian Industries Corp.
- Current Assignee Address: US MI Auburn Hills
- Agency: Nixon & Vanderhye P.C.
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
Certain example embodiments of this invention relate to a rotatable magnetron sputtering target(s) for use in sputtering material(s) onto a substrate. In certain example embodiments, the target includes a cathode tube with a target material applied thereto via plasma spraying or the like. A bonding layer is provided on the tube, between the cathode tube and the target material. The bonding layer is thicker proximate at least one end portion of the target than at a central portion of the target in order to reduce the likelihood of burn-through to or of the cathode tube during sputtering.
Public/Granted literature
- US20070062805A1 Sputtering target with bonding layer of varying thickness under target material Public/Granted day:2007-03-22
Information query
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