发明授权
- 专利标题： Polymer-assisted deposition of films
- 专利标题（中）： 聚合物辅助沉积膜
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申请号： US11804472申请日： 2007-05-17
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公开(公告)号： US08124176B2公开(公告)日： 2012-02-28
- 发明人: Thomas M. McCleskey , Anthony K. Burrell , Quanxi Jia , Yuan Lin
- 申请人： Thomas M. McCleskey , Anthony K. Burrell , Quanxi Jia , Yuan Lin
- 申请人地址： US NM Los Alamos
- 专利权人： Los Alamos National Security, LLC
- 当前专利权人： Los Alamos National Security, LLC
- 当前专利权人地址： US NM Los Alamos
- 代理商 Bruce H. Cottrell; Samuel L. Borkowsky
- 主分类号： B05D3/04
- IPC分类号： B05D3/04 ; B05D3/02
摘要：
A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
公开/授权文献
- US20080050528A1 Polymer-assisted deposition of films 公开/授权日：2008-02-28
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