Invention Grant
- Patent Title: Non-aggregating nanoparticles and the use thereof
- Patent Title (中): 非聚集性纳米粒子及其用途
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Application No.: US12583078Application Date: 2009-08-13
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Publication No.: US08124230B2Publication Date: 2012-02-28
- Inventor: Paul A. Zimmerman , Aristeidis Bakandritsos , Michael F. Zettel , Markos Trikeriotis , Robert Rodriguez , Emmanuel P. Giannelis , Woo Jin Bae , Christopher K. Ober
- Applicant: Paul A. Zimmerman , Aristeidis Bakandritsos , Michael F. Zettel , Markos Trikeriotis , Robert Rodriguez , Emmanuel P. Giannelis , Woo Jin Bae , Christopher K. Ober
- Applicant Address: US TX Austin US NY Ithaca
- Assignee: Intel Corporation,Cornell University
- Current Assignee: Intel Corporation,Cornell University
- Current Assignee Address: US TX Austin US NY Ithaca
- Agency: Fulbright & Jaworski LLP
- Main IPC: B32B5/66
- IPC: B32B5/66
Abstract:
The present invention relates generally to non-aggregating nanoparticles, including ligand capped metal oxide nanoparticles. Methods for their synthesis and methods for their use, for example, for improved immersion lithography processes, are also disclosed.
Public/Granted literature
- US20110039105A1 Non-aggregating nanoparticles and the use thereof Public/Granted day:2011-02-17
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