发明授权
- 专利标题: Semiconductor device and method of forming passive devices
- 专利标题(中): 半导体器件及其形成无源器件的方法
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申请号: US11958546申请日: 2007-12-18
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公开(公告)号: US08124490B2公开(公告)日: 2012-02-28
- 发明人: Yaojian Lin , Haijing Cao , Qing Zhang , Robert C. Frye
- 申请人: Yaojian Lin , Haijing Cao , Qing Zhang , Robert C. Frye
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A flip chip semiconductor device has a substrate with a plurality of active devices formed thereon. A passive device is formed on the substrate by depositing a first conductive layer over the substrate, depositing an insulating layer over the first conductive layer, and depositing a second conductive layer over the insulating layer. The passive device is a metal-insulator-metal capacitor. The deposition of the insulating layer and first and second conductive layers is performed without photolithography. An under bump metallization (UBM) layer is formed on the substrate in electrical contact with the plurality of active devices. A solder bump is formed over the UBM layer. The passive device can also be a resistor by depositing a resistive layer over the first conductive layer and depositing a third conductive layer over the resistive layer. The passive device electrically contacts the solder bump.
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