发明授权
- 专利标题： Method of drying an object and apparatus for performing the same
- 专利标题（中）： 干燥物体的方法及其执行方法
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申请号： US11826368申请日： 2007-07-13
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公开(公告)号： US08128738B2公开(公告)日： 2012-03-06
- 发明人: Kuen-Byul Kim , In-Gi Kim , Dae-Bum Park , Soung-Kil Ryu , Seung-Bu Baek , Seo-Hyun Kim
- 申请人： Kuen-Byul Kim , In-Gi Kim , Dae-Bum Park , Soung-Kil Ryu , Seung-Bu Baek , Seo-Hyun Kim
- 申请人地址： KR Gyeonggi-do
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Gyeonggi-do
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： KR10-2006-0066228 20060714
- 主分类号： B01D46/00
- IPC分类号： B01D46/00
摘要：
In a method of drying an object, a first drying fluid and a second dry fluid may be first heated to form a gas mixture. The gas mixture may be second heated to prevent the mixed gas from condensing. The second heated gas mixture may be filtered to remove impurities from the second heated mixed gas. The filtered mixed gas may be then applied to the object so as to dry the object.