发明授权
- 专利标题： Film-forming apparatus
- 专利标题（中）： 成膜装置
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申请号： US12404878申请日： 2009-03-16
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公开(公告)号： US08128751B2公开(公告)日： 2012-03-06
- 发明人: Shigeru Kasai , Takashi Kakegawa
- 申请人： Shigeru Kasai , Takashi Kakegawa
- 申请人地址： JP Tokyo-To
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo-To
- 代理机构： Smith, Gambrell & Russell, LLP
- 优先权： JP2001-034520 20010209
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C15/52 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22
摘要：
A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.
公开/授权文献
- US20090178614A1 FILM-FORMING APPARATUS 公开/授权日：2009-07-16
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