Invention Grant
- Patent Title: MEMS device with surface having a low roughness exponent
- Patent Title (中): 表面具有低粗糙度指数的MEMS器件
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Application No.: US12026844Application Date: 2008-02-06
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Publication No.: US08131006B2Publication Date: 2012-03-06
- Inventor: John R. Martin
- Applicant: John R. Martin
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: H04R11/02
- IPC: H04R11/02 ; H01L21/00
Abstract:
A MEMS microphone has a backplate and a movable diaphragm that together form a variable capacitance. The backplate has a backplate surface and, in a corresponding manner, the diaphragm has a diaphragm surface that faces the backplate surface. At least one of the backplate surface and the diaphragm surface has at least a portion with a Hurst exponent that is less than or equal to about 0.5.
Public/Granted literature
- US20080187154A1 MEMS Device with Surface Having a Low Roughness Exponent Public/Granted day:2008-08-07
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