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US08133548B2 Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and/or photonic treatment 有权
通过电磁和/或光子处理在衬底上制备取向孔隙介电材料的方法

Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and/or photonic treatment
Abstract:
Provided a method for producing an oriented-porosity dielectric material on a substrate. The method includes depositing a vapor phase on a substrate of a composite layer comprising a material forming a matrix and a compound comprising chemical groups capable of being oriented under the effect of an electromagnetic field and/or photonic radiation; treating the composite layer to obtain the cross-linking of the material forming a matrix; and subjecting the substrate coated with the composite layer to an electromagnetic field and/or a photonic radiation.
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