发明授权
- 专利标题: Thermally and electrically conductive structure comprising a carbon nanotube and a carbon coating, and method of reducing a contact resistance of same
- 专利标题(中): 包含碳纳米管和碳涂层的导热和导电结构以及降低其接触电阻的方法
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申请号: US12587371申请日: 2009-10-05
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公开(公告)号: US08133585B2公开(公告)日: 2012-03-13
- 发明人: Linda A. Shekhawat , Nachiket R. Raravikar
- 申请人: Linda A. Shekhawat , Nachiket R. Raravikar
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理商 Kenneth A. Nelson
- 主分类号: B32B5/16
- IPC分类号: B32B5/16
摘要:
A thermally and electrically conductive structure comprises a carbon nanotube (110) having an outer surface (111) and a carbon coating (120) covering at least a portion of the outer surface of the carbon nanotube. The carbon coating may be applied to the carbon nanotube by providing a nitrile-containing polymer, coating the carbon nanotube with the nitrile-containing polymer, and pyrolyzing the nitrile-containing polymer in order to form the carbon coating on the carbon nanotube. The carbon nanotube may further be coated with a low contact resistance layer (130) exterior to the carbon coating and a metal layer (140) exterior to the low contact resistance layer.
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