发明授权
- 专利标题: Method of magnetic tunneling layer processes for spin-transfer torque MRAM
- 专利标题(中): 旋转转矩MRAM的磁隧道层工艺方法
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申请号: US11975045申请日: 2007-10-17
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公开(公告)号: US08133745B2公开(公告)日: 2012-03-13
- 发明人: Tom Zhong , Rongfu Xiao , Chyu-Jiuh Torng , Adam Zhong
- 申请人: Tom Zhong , Rongfu Xiao , Chyu-Jiuh Torng , Adam Zhong
- 申请人地址: US CA Milpitas
- 专利权人: MagIC Technologies, Inc.
- 当前专利权人: MagIC Technologies, Inc.
- 当前专利权人地址: US CA Milpitas
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for forming a MTJ in a STT-MRAM is disclosed in which the easy-axis CD is determined independently of the hard-axis CD. One approach involves two photolithography steps and two etch steps to form a post in a hard mask which is transferred through a MTJ stack of layers by a third etch process. Optionally, the third etch may stop on the tunnel barrier or in the free layer. A second embodiment involves forming a first parallel line pattern on a hard mask layer and transferring the line pattern through the MTJ stack with a first etch step. A planar insulation layer is formed adjacent to the sidewalls in the line pattern and then a second parallel line pattern is formed which is transferred by a second etch through the MTJ stack to form a post pattern. Etch end point may be controlled independently for hard-axis and easy-axis dimensions.
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