发明授权
- 专利标题: Light-emitting diodes on concave texture substrate
- 专利标题(中): 凹面纹理基板上的发光二极管
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申请号: US12247895申请日: 2008-10-08
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公开(公告)号: US08134163B2公开(公告)日: 2012-03-13
- 发明人: Chen-Hua Yu , Hung-Ta Lin , Wen-Chih Chiou , Ding-Yuan Chen , Chia-Lin Yu
- 申请人: Chen-Hua Yu , Hung-Ta Lin , Wen-Chih Chiou , Ding-Yuan Chen , Chia-Lin Yu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manfacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manfacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L33/08
- IPC分类号: H01L33/08
摘要:
A semiconductor device having light-emitting diodes (LEDs) formed on a concave textured substrate is provided. A substrate is patterned and etched to form recesses. A separation layer is formed along the bottom of the recesses. An LED structure is formed along the sidewalls and, optionally, along the surface of the substrate between adjacent recesses. In these embodiments, the surface area of the LED structure is increased as compared to a planar surface. In another embodiment, the LED structure is formed within the recesses such that the bottom contact layer is non-conformal to the topology of the recesses. In these embodiments, the recesses in a silicon substrate result in a cubic structure in the bottom contact layer, such as an n-GaN layer, which has a non-polar characteristic and exhibits higher external quantum efficiency.
公开/授权文献
- US20100032700A1 Light-Emitting Diodes on Concave Texture Substrate 公开/授权日:2010-02-11
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