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US08136084B2 Arranging through silicon vias in IC layout 有权
在IC布局中排列硅通孔

Arranging through silicon vias in IC layout
摘要:
A portion of an IC layout that includes a plurality of through silicon vias (TSVs) is evaluated to identify linearly aligned TSVs. The portion of the IC layout is modified to reduce a number of the linearly aligned TSVs, resulting in less wafer breakage.
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