发明授权
- 专利标题: Lapping carrier and method
- 专利标题(中): 研磨载体和方法
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申请号: US12513705申请日: 2007-11-19
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公开(公告)号: US08137157B2公开(公告)日: 2012-03-20
- 发明人: Timothy D. Fletcher , Todd J. Christianson , Vincent D. Romero , Bruce A. Sventek
- 申请人: Timothy D. Fletcher , Todd J. Christianson , Vincent D. Romero , Bruce A. Sventek
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 代理商 Dean M. Harts; Ann Kulprathipanja
- 国际申请: PCT/US2007/085103 WO 20071119
- 国际公布: WO2008/064158 WO 20080529
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B5/00
摘要:
Provided is a double-sided lapping carrier comprising a base carrier having a first major surface, a second major surface and at least one aperture for holding a workpiece, said aperture extending from the first major surface through the base carrier to the second major surface, wherein the base carrier comprises a first metal, the circumference of said aperture is defined by a third surface of the base carrier consisting of the first metal and, at least a portion of the first major surface or at least a portion of each of the first and the second major surfaces comprises a polymeric region, said polymeric region comprising a polymer having a work to failure of at least 10 Joules. Also provide are methods of lapping.
公开/授权文献
- US20100048105A1 Lapping Carrier and Method 公开/授权日:2010-02-25
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