发明授权
US08138061B2 Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide
有权
使用亲水硅表面的准疏水Si-Si晶片结合和界面结合氧化物的溶解
- 专利标题: Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide
- 专利标题(中): 使用亲水硅表面的准疏水Si-Si晶片结合和界面结合氧化物的溶解
-
申请号: US11031165申请日: 2005-01-07
-
公开(公告)号: US08138061B2公开(公告)日: 2012-03-20
- 发明人: Joel P. de Souza , John A. Ott , Alexander Reznicek , Devendra K. Sadana , Katherine L. Saenger
- 申请人: Joel P. de Souza , John A. Ott , Alexander Reznicek , Devendra K. Sadana , Katherine L. Saenger
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Louis J. Percello, Esq.
- 主分类号: H01L21/46
- IPC分类号: H01L21/46
摘要:
The present invention provides a method for removing or reducing the thickness of ultrathin interfacial oxides remaining at Si—Si interfaces after silicon wafer bonding. In particular, the invention provides a method for removing ultrathin interfacial oxides remaining after hydrophilic Si—Si wafer bonding to create bonded Si—Si interfaces having properties comparable to those achieved with hydrophobic bonding. Interfacial oxide layers of order of about 2 to about 3 nm are dissolved away by high temperature annealing, for example, an anneal at 1300°-1330° C. for 1-5 hours. The inventive method is used to best advantage when the Si surfaces at the bonded interface have different surface orientations, for example, when a Si surface having a (100) orientation is bonded to a Si surface having a (110) orientation. In a more general aspect of the invention, the similar annealing processes may be used to remove undesired material disposed at a bonded interface of two silicon-containing semiconductor materials. The two silicon-containing semiconductor materials may be the same or different in surface crystal orientation, microstructure (single-crystal, polycrystalline, or amorphous), and composition.