发明授权
US08138083B2 Interconnect structure having enhanced electromigration reliability and a method of fabricating same 有权
具有增强的电迁移可靠性的互连结构及其制造方法

Interconnect structure having enhanced electromigration reliability and a method of fabricating same
摘要:
An interconnect structure having improved electromigration (EM) reliability is provided. The inventive interconnect structure avoids a circuit dead opening that is caused by EM failure by incorporating a EM preventing liner at least partially within a metal interconnect. In one embodiment, a “U-shaped” EM preventing liner is provided that abuts a diffusion barrier that separates conductive material from the dielectric material. In another embodiment, a space is located between the “U-shaped” EM preventing liner and the diffusion barrier. In yet another embodiment, a horizontal EM liner that abuts the diffusion barrier is provided. In yet a further embodiment, a space exists between the horizontal EM liner and the diffusion barrier.
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