发明授权
- 专利标题: Interconnect structure having enhanced electromigration reliability and a method of fabricating same
- 专利标题(中): 具有增强的电迁移可靠性的互连结构及其制造方法
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申请号: US12534478申请日: 2009-08-03
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公开(公告)号: US08138083B2公开(公告)日: 2012-03-20
- 发明人: Chih-Chao Yang , Ping-Chuan Wang , Yun-Yu Wang
- 申请人: Chih-Chao Yang , Ping-Chuan Wang , Yun-Yu Wang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Ian D. MacKinnon, Esq.
- 主分类号: H01L21/768
- IPC分类号: H01L21/768
摘要:
An interconnect structure having improved electromigration (EM) reliability is provided. The inventive interconnect structure avoids a circuit dead opening that is caused by EM failure by incorporating a EM preventing liner at least partially within a metal interconnect. In one embodiment, a “U-shaped” EM preventing liner is provided that abuts a diffusion barrier that separates conductive material from the dielectric material. In another embodiment, a space is located between the “U-shaped” EM preventing liner and the diffusion barrier. In yet another embodiment, a horizontal EM liner that abuts the diffusion barrier is provided. In yet a further embodiment, a space exists between the horizontal EM liner and the diffusion barrier.
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