发明授权
- 专利标题： Mass spectrometry unit
- 专利标题（中）： 质谱单位
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申请号： US12599301申请日： 2008-04-14
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公开(公告)号： US08138473B2公开(公告)日： 2012-03-20
- 发明人: Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
- 申请人： Toyoaki Nakajima , Yujirou Kurokawa , Tsutomu Yuri , Ryota Tanaka , Shuji Yoshida
- 申请人地址： JP Chigasaki-Shi
- 专利权人： Ulvac, Inc.
- 当前专利权人： Ulvac, Inc.
- 当前专利权人地址： JP Chigasaki-Shi
- 代理机构： Grossman, Tucker, Perreault & Pfleger, PLLC
- 优先权： JPP2007-129408 20070515
- 国际申请： PCT/JP2008/057249 WO 20080414
- 国际公布： WO2008/139809 WO 20081120
- 主分类号： H01J49/26
- IPC分类号： H01J49/26 ; B01D59/44
摘要：
A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.
公开/授权文献
- US20100213363A1 MASS SPECTROMETRY UNIT 公开/授权日：2010-08-26
信息查询
