公开(公告)号：US20100213363A1

公开(公告)日：2010-08-26

申请号：US12599301

申请日：2008-04-14

申请人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Shuji Yoshida

发明人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Shuji Yoshida

IPC分类号： H01J49/26

CPC分类号： G01N27/62 ,  G01L21/30 ,  H01J41/10 ,  H01J49/0027

摘要： A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.

摘要翻译： 本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。 所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与 由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。

公开(公告)号：US08674298B2

公开(公告)日：2014-03-18

申请号：US13519928

申请日：2011-02-15

申请人： Toyoaki Nakajima ,  Yuujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka

发明人： Toyoaki Nakajima ,  Yuujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka

IPC分类号： H01J49/26

CPC分类号： H01J49/4215

摘要： A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.

摘要翻译： 用于分析试验片中的气体成分的四极杆质谱仪是以电网的电阻加热实现的结构，其中可以低成本地进行气体成分的高精度分析，同时防止 灵敏度降低。 四极质谱仪设置有可拆卸地安装在试件上的传感器部分。 假设将传感器部分装配到测试件上的方向是向上的，传感器部分设置有：设置在传感器部分的下端的支撑体的预定形状; 离子源，其设置在所述支撑体上，并且具有用于电离所述气体的灯丝和栅格; 四极部，其设置在所述离子源上，并且其中四个柱状电极彼此以预定的周向距离设置; 以及离子检测部，其设置在四极部上并且通过在相对电极之间施加DC电压和AC电压来收集已经通过四极部的预定离子。

公开(公告)号：US08013291B2

公开(公告)日：2011-09-06

申请号：US12595100

申请日：2008-04-14

申请人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

发明人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

IPC分类号： H01J49/16

摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

公开(公告)号：US20120280122A1

公开(公告)日：2012-11-08

申请号：US13519928

申请日：2011-02-15

申请人： Toyoaki Nakajima ,  Yuujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka

发明人： Toyoaki Nakajima ,  Yuujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka

IPC分类号： H01J49/26

CPC分类号： H01J49/4215

摘要： A quadrupole mass spectrometer for use in analyzing gas components in a test piece is made in a constitution in which resistance heating of a grid is materialized, and in which a high-accuracy analysis of the gas components is possible at a low cost while preventing the sensitivity from lowering. A quadrupole mass spectrometer is provided with a sensor section which can be detachably fitted to the test piece. Supposing that the direction of fitting the sensor section to the test piece is in an upward direction, the sensor section is provided with: a predetermined shape of supporting body which is provided at a lower end of the sensor section; an ion source which is provided on the supporting body and which has a filament and a grid for ionizing the gas; a quadrupole section which is provided on the ion source and in which four columnar electrodes are disposed at a predetermined circumferential distance from one another; and an ion detection section which is disposed on the quadrupole section and which collects predetermined ions that have passed through the quadrupole section by applying DC and AC voltages between opposite electrodes.

摘要翻译： 用于分析试验片中的气体成分的四极杆质谱仪是以电网的电阻加热实现的结构，其中可以低成本地进行气体成分的高精度分析，同时防止 灵敏度降低。 四极质谱仪设置有可拆卸地安装在试件上的传感器部分。 假设将传感器部分装配到测试件上的方向是向上的，传感器部分设置有：设置在传感器部分的下端的支撑体的预定形状; 离子源，其设置在所述支撑体上，并且具有用于电离所述气体的灯丝和栅格; 四极部，其设置在所述离子源上，并且其中四个柱状电极彼此以预定的周向距离设置; 以及离子检测部，其设置在四极部上并且通过在相对电极之间施加DC电压和AC电压来收集已经通过四极部的预定离子。

公开(公告)号：US20100133429A1

公开(公告)日：2010-06-03

申请号：US12595100

申请日：2008-04-14

申请人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

发明人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

IPC分类号： H01J49/26

CPC分类号： H01J49/0031

摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

摘要翻译： 控制质谱仪的方法包括以下步骤：向具有阴极电极和阳极电极的离子源的阴极提供电流，并将待测气体分子电离; 选择通过质荷比在离子源中产生的离子; 以及检测所选离子的离子电流值。 当基于离子电流值的检测结果测量要测量的气体的分压时，阴极电流被提供给阴极，使得在阴极电极和阳极电极之间流动的发射电流变得恒定。 当未测量待测气体的分压时，向阴极供给电流值小于阴极电流的恒定电流。

公开(公告)号：US08115166B2

公开(公告)日：2012-02-14

申请号：US12595100

申请日：2008-04-14

申请人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

发明人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Jiro Endo ,  Hitomi Obise

IPC分类号： H01J49/16

CPC分类号： H01J49/0031

摘要： A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.

摘要翻译： 控制质谱仪的方法包括以下步骤：向具有阴极电极和阳极电极的离子源的阴极提供电流，并将待测气体分子电离; 选择通过质荷比在离子源中产生的离子; 以及检测所选离子的离子电流值。 当基于离子电流值的检测结果测量要测量的气体的分压时，阴极电流被提供给阴极，使得在阴极电极和阳极电极之间流动的发射电流变得恒定。 当未测量待测气体的分压时，将具有比阴极电流小的电流值的恒定电流供给到阴极电极。

公开(公告)号：US08138473B2

公开(公告)日：2012-03-20

申请号：US12599301

申请日：2008-04-14

申请人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Shuji Yoshida

发明人： Toyoaki Nakajima ,  Yujirou Kurokawa ,  Tsutomu Yuri ,  Ryota Tanaka ,  Shuji Yoshida

IPC分类号： H01J49/26 ,  B01D59/44

CPC分类号： G01N27/62 ,  G01L21/30 ,  H01J41/10 ,  H01J49/0027

摘要： A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.

摘要翻译： 本发明的质谱装置包括质量分数部，其根据质荷比检测待测气体的离子电流值，由此测定待测气体的分压。 所述质谱装置还包括：控制部，用于预先存储降低所述质谱分析装置的特定部分的功能的特定气体的质荷比的记录，其中如果所述特定气体的离子电流值与 由质谱部检测出的特定气体的质荷比不小于预定值，控制部分输出表示特定部分功能下降的警告信号。

公开(公告)号：US5595604A

公开(公告)日：1997-01-21

申请号：US528560

申请日：1995-09-15

申请人： Shuichi Kobayashi ,  Masayuki Kobayashi ,  Tsutomu Yuri ,  Youichi Serizawa ,  Mamoru Akimoto ,  Shinichi Okoshi

发明人： Shuichi Kobayashi ,  Masayuki Kobayashi ,  Tsutomu Yuri ,  Youichi Serizawa ,  Mamoru Akimoto ,  Shinichi Okoshi

IPC分类号： C30B31/14 ,  C23C16/458 ,  C30B25/12 ,  H01L21/205 ,  H01L21/22 ,  H01L21/673 ,  C23C16/00

CPC分类号： H01L21/67306 ,  C23C16/4583 ,  C30B25/12 ,  H01L21/67309

摘要： A vertical wafer supporting boat is provided in which adequate reaction gas is supplied to the portion of a wafer surface to be treated which is inserted in holding grooves in members of the wafer supporting boat during the heat treatment and thus uniform heat treatment is achieved across the surface of each wafer. The particular groove shape preferably exploits the rotation of the boat in a vertical furnace to thereby uniformly supply the reaction gas on the entire surface to be treated of each of the wafers disposed in the boat. The holding grooves are inclined relative to a direction tangent to a wafer edge in order that the clearance facing the surface to be treated of a wafer is profiled to have an edge-like space by gradually increasing the width in the tangential direction of the wafer and, preferably, the internal groove surface opposed to the surface to be treated of the wafer is inclined to increase in width toward the center of the wafer.

摘要翻译： 提供了一种垂直的晶片支撑船，其中在热处理期间，将待处理的晶片表面的部分放入晶片支撑船的构件中的保持槽中的适当的反应气体， 每个晶片的表面。 特定的凹槽形状优选利用垂直炉中的船的旋转，从而在布置在船中的每个晶片的整个待处理表面上均匀地供应反应气体。 保持槽相对于与晶片边缘相切的方向倾斜，以便通过逐渐增加晶片的切线方向上的宽度来将面向待处理晶片的表面的间隙成型为具有边缘状空间，并且 优选地，与晶片的待处理表面相对的内槽表面倾向于朝向晶片的中心增加宽度。