Invention Grant
- Patent Title: Magnetic scanning system with improved efficiency
- Patent Title (中): 磁性扫描系统提高了效率
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Application No.: US12769226Application Date: 2010-04-28
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Publication No.: US08138484B2Publication Date: 2012-03-20
- Inventor: Bo Vanderberg
- Applicant: Bo Vanderberg
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies Inc.
- Current Assignee: Axcelis Technologies Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J1/50
- IPC: H01J1/50

Abstract:
Some aspects of the present invention facilitate ion implantation by using a magnetic beam scanner that includes first and second magnetic elements having a beam path region therebetween. One or more magnetic flux compression elements are disposed proximate to the beam path region and between the first and second magnetic elements. During operation, the first and magnetic elements cooperatively generate an oscillatory time-varying magnetic field in the beam path region to scan an ion beam back and forth in time. The one or more magnetic flux compression elements compress the magnetic flux provided by the first and second magnetic elements, thereby reducing the amount of power required to magnetically scan the beam back and forth (relative to previous implementations). Other scanners, systems, and methods are also disclosed.
Public/Granted literature
- US20110266456A1 Magnetic Scanning System with Improved Efficiency Public/Granted day:2011-11-03
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