Invention Grant
- Patent Title: Inspection system and method for high-speed serial data transfer
- Patent Title (中): 高速串行数据传输检测系统和方法
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Application No.: US12100500Application Date: 2008-04-10
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Publication No.: US08139840B1Publication Date: 2012-03-20
- Inventor: Yunxian Chu , Alexander Slobodov
- Applicant: Yunxian Chu , Alexander Slobodov
- Applicant Address: US CA San Jose
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA San Jose
- Agency: Daffer McDaniel, LLP
- Agent Kevin L. Daffer
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
An inspection system and method for serial high-speed image data transfer is provided herein. According to one embodiment, the method may include receiving multiple channels of image data at an input data rate and buffering the image data at the input data rate until the buffered data reaches a predetermined size. Once the predetermined size has been reached, the method may include packing the buffered data, encoding the data packet, serializing the encoded data packet and converting the encoded data packet into an optical signal. In some cases, the image data may be packed along with a data header containing information about the system. Once converted, each optical signal (i.e., representing one data packet) may be transmitted serially over one or more fibre channels to a processing node of the inspection system. In most cases, the data is packed, encoded, serialized and transmitted to the processing node at a data rate much higher than the input data rate. The processing node analyzes the optical signal to detect defects on a specimen under inspection.
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