发明授权
- 专利标题: Charged particle beam apparatus
- 专利标题(中): 带电粒子束装置
-
申请号: US12490775申请日: 2009-06-24
-
公开(公告)号: US08143573B2公开(公告)日: 2012-03-27
- 发明人: Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
- 申请人: Sukehiro Ito , Junichi Katane , Shigeru Kawamata , Shinichi Tomita
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2008-167023 20080626
- 主分类号: G02F1/1335
- IPC分类号: G02F1/1335 ; G01K1/08
摘要:
A charged particle beam impinging on a specimen is set to have left and right tilt angles corresponding to a parallactic angle. A control unit is provided which scans the beam over the specimen while giving a left tilt and a right tilt corresponding to the parallactic angle alternately to the beam on each scanning line. In this way, images are acquired. A three-dimensional image in which deterioration of the resolution is suppressed is displayed in real time by combining aberration cancellation means with the control of the beam according to the parallactic angle. The aberration cancellation means uses an optical system having plural stages of lenses to provide overall cancellation of aberrations by making use of the action of a lens to deflect the beam back to the optical axis.
公开/授权文献
- US20090322973A1 CHARGED PARTICLE BEAM APPARATUS 公开/授权日:2009-12-31