发明授权
- 专利标题： MEMS sensor with movable z-axis sensing element
- 专利标题（中）： 具有可移动z轴传感元件的MEMS传感器
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申请号： US12205241申请日： 2008-09-05
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公开(公告)号： US08146425B2公开(公告)日： 2012-04-03
- 发明人: Xin Zhang , Michael W. Judy
- 申请人： Xin Zhang , Michael W. Judy
- 申请人地址： US MA Norwood
- 专利权人： Analog Devices, Inc.
- 当前专利权人： Analog Devices, Inc.
- 当前专利权人地址： US MA Norwood
- 代理机构： Sunstein Kann Murphy & Timbers LLP
- 主分类号： G01P15/125
- IPC分类号： G01P15/125
摘要：
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
公开/授权文献
- US20100058865A1 MEMS Sensor with Movable Z-Axis Sensing Element 公开/授权日：2010-03-11
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