发明授权
- 专利标题: Positive photosensitive composition
- 专利标题(中): 正光敏组合物
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申请号: US12608567申请日: 2009-10-29
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公开(公告)号: US08148044B2公开(公告)日: 2012-04-03
- 发明人: Shuhei Yamaguchi , Tomotaka Tsuchimura , Yuko Tada
- 申请人: Shuhei Yamaguchi , Tomotaka Tsuchimura , Yuko Tada
- 申请人地址: JP Tokyo
- 专利权人: Fujifilm Corporation
- 当前专利权人: Fujifilm Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2008-282610 20081031; JP2008-301006 20081126
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/20 ; G03F7/30 ; C07C309/15
摘要:
A positive photosensitive composition includes at least one compound that when exposed to actinic rays or radiation, generates any of the sulfonic acids of general formula (I) and a resin whose solubility in an alkali developer is increased by the action of an acid, wherein each of X1 and X2 independently represents a fluorine atom or a fluoroalkyl group, R1 represents a group with a polycyclic structure, provided that the polycyclic structure may have a substituent, and R2 represents a hydrogen atom, a chain alkyl group, a monocyclic alkyl group, a group with a polycyclic structure or a monocyclic aryl group, provided that each of the chain alkyl group, monocyclic alkyl group, polycyclic structure and monocyclic aryl group may have a substituent, and provided that R1 and R2 may be bonded to each other to thereby form a polycyclic structure.
公开/授权文献
- US20100136479A1 POSITIVE PHOTOSENSITIVE COMPOSITION 公开/授权日:2010-06-03
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