发明授权
- 专利标题: Ink jet recording head and manufacturing method of the same
- 专利标题(中): 喷墨记录头及其制造方法相同
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申请号: US11680821申请日: 2007-03-01
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公开(公告)号: US08148049B2公开(公告)日: 2012-04-03
- 发明人: Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
- 申请人: Hiroyuki Murayama , Junichi Kobayashi , Yoshinori Tagawa , Kenji Fujii , Hideo Tamura , Taichi Yonemoto , Keiji Watanabe
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2006-059536 20060306
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
A manufacturing method of an ink jet recording head includes steps of forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating element is formed, the energy generating element being configured to generate energy for use in discharging ink; forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed; exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; and dissolving and removing the mold material to form a liquid flow path. During the exposing of the coating resin layer, a total amount of exposure energy per unit area applied to an exposure region other than a region of the coating resin layer positioned above the mold material is greater than that of exposure energy per unit area applied to the region of the coating resin layer positioned above the mold material.
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