发明授权
US08148721B2 Bottom gate type thin film transistor, method of manufacturing the same, and display apparatus 有权
底栅型薄膜晶体管,其制造方法以及显示装置

Bottom gate type thin film transistor, method of manufacturing the same, and display apparatus
摘要:
Provided is a bottom gate type thin film transistor including on a substrate (1) a gate electrode (2), a first insulating film (3) as a gate insulating film, an oxide semiconductor layer (4) as a channel layer, a second insulating film (5) as a protective layer, a source electrode (6), and a drain electrode (7), in which the oxide semiconductor layer (4) includes an oxide including at least one selected from the group consisting of In, Zn, and Sn, and the second insulating film (5) includes an amorphous oxide insulator formed so as to be in contact with the oxide semiconductor layer (4) and contains therein 3.8×1019 molecules/cm3 or more of a desorbed gas observed as oxygen by temperature programmed desorption mass spectrometry.
信息查询
0/0