发明授权
- 专利标题: Bottom gate type thin film transistor, method of manufacturing the same, and display apparatus
- 专利标题(中): 底栅型薄膜晶体管,其制造方法以及显示装置
-
申请号: US12515268申请日: 2007-11-20
-
公开(公告)号: US08148721B2公开(公告)日: 2012-04-03
- 发明人: Ryo Hayashi , Nobuyuki Kaji , Hisato Yabuta
- 申请人: Ryo Hayashi , Nobuyuki Kaji , Hisato Yabuta
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2006-328308 20061205; JP2007-273863 20071022
- 国际申请: PCT/JP2007/072878 WO 20071120
- 国际公布: WO2008/069056 WO 20080612
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L29/786 ; H01L21/336
摘要:
Provided is a bottom gate type thin film transistor including on a substrate (1) a gate electrode (2), a first insulating film (3) as a gate insulating film, an oxide semiconductor layer (4) as a channel layer, a second insulating film (5) as a protective layer, a source electrode (6), and a drain electrode (7), in which the oxide semiconductor layer (4) includes an oxide including at least one selected from the group consisting of In, Zn, and Sn, and the second insulating film (5) includes an amorphous oxide insulator formed so as to be in contact with the oxide semiconductor layer (4) and contains therein 3.8×1019 molecules/cm3 or more of a desorbed gas observed as oxygen by temperature programmed desorption mass spectrometry.
公开/授权文献
信息查询
IPC分类: