Invention Grant
US08148875B2 Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
失效
压电振动器，压电振动器的制造方法，振荡器，电子装置和无线电控制的钟表
- Patent Title: Piezoelectric vibrator, manufacturing method of piezoelectric vibrator, oscillator, electronic device, and radio-controlled timepiece
- Patent Title (中): 压电振动器，压电振动器的制造方法，振荡器，电子装置和无线电控制的钟表
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Application No.: US12845142Application Date: 2010-07-28
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Publication No.: US08148875B2Publication Date: 2012-04-03
- Inventor: Kiyoshi Aratake
- Applicant: Kiyoshi Aratake
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2009-175638 20090728
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H03H9/17
Abstract:
A piezoelectric vibrator which can be manufactured efficiently and a manufacturing method thereof are provided. The piezoelectric vibrator includes: a tuning-fork-type piezoelectric vibrating piece which has a pair of vibration arm portions, excitation electrodes formed on base end portions of the vibration arm portions, and weight metal films formed on distal end portions of the vibration arm portions; and a package which houses the piezoelectric vibrating piece therein. A gettering film on which a laser radiation flaw is formed is formed on intermediate portions between the base end portions and the distal end portions of the vibration arm portions. A first metal film included in the excitation electrode, a second metal film included in the weight metal film and the gettering film are formed using the same material.
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