发明授权
- 专利标题： Method for controlling flow and concentration of liquid precursor
- 专利标题（中）： 控制液体前体流动和浓度的方法
-
申请号： US12353076申请日： 2009-01-13
-
公开(公告)号： US08151814B2公开(公告)日： 2012-04-10
- 发明人: Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
- 申请人： Akira Shimizu , Akiko Kobayashi , Hiroki Kanayama
- 申请人地址： JP
- 专利权人： ASM Japan K.K.
- 当前专利权人： ASM Japan K.K.
- 当前专利权人地址： JP
- 代理机构： Knobbe Martens Olson & Bear LLP
- 主分类号： F17D1/17
- IPC分类号： F17D1/17 ; C23C16/448
摘要：
A method for controlling flow and concentration of a liquid precursor includes: supplying a carrier gas to a first auto-pressure regulator and outputting therefrom the carrier gas at a first pressure to a precursor reservoir; outputting the mixture of the vaporized precursor and the carrier gas from the precursor reservoir; and supplying the mixture to a second auto-pressure regulator and outputting therefrom the mixture at a second pressure to a reactor via an orifice.