发明授权
- 专利标题: Method for forming fine particles, method for forming concavities and convexities, and device for forming fine particles
- 专利标题(中): 形成细颗粒的方法,形成凹凸的方法和用于形成细颗粒的装置
-
申请号: US12291817申请日: 2008-11-13
-
公开(公告)号: US08152972B2公开(公告)日: 2012-04-10
- 发明人: Noboru Iwata , Yoshiteru Murakami
- 申请人: Noboru Iwata , Yoshiteru Murakami
- 申请人地址: JP Osaka
- 专利权人: Sharp Kabushiki Kaisha
- 当前专利权人: Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Osaka
- 代理机构: Edwards Wildman Palmer LLP
- 代理商 David G. Conlin; Stephen D. LeBarron
- 优先权: JP2007-302292 20071121
- 主分类号: C23C14/00
- IPC分类号: C23C14/00
摘要:
A method of the present invention for forming fine particles includes forming fine particles on a substrate by supplying, in the presence of inert gas, to the substrate, atoms or molecules of a supply material capable of being combined with a material constituting a surface of the substrate to produce a compound, the atoms or the molecules being supplied from a supply source. The supply source is positioned in such a manner as not to be directly connected by a line with the surface of the substrate where the fine particles are to be formed, and a high-frequency voltage varying positively and negatively, ranging from 100 kHz to 100 MHz, is applied to at least one of the substrate and a substrate supporter for supporting the substrate. This realizes a method for forming fine particles that allows forming highly uniformed magnetic fine particles with a periodic pattern through a simple process at a time.