发明授权
US08153503B2 Protection of cavities opening onto a face of a microstructured element
失效
保护打开到微结构元件的表面上的空腔
- 专利标题： Protection of cavities opening onto a face of a microstructured element
- 专利标题（中）： 保护打开到微结构元件的表面上的空腔
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申请号： US12295997申请日： 2007-04-03
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公开(公告)号： US08153503B2公开(公告)日： 2012-04-10
- 发明人: Barbara Charlet , Hélène Le Poche , Yveline Gobil
- 申请人： Barbara Charlet , Hélène Le Poche , Yveline Gobil
- 申请人地址： FR Paris
- 专利权人： Commissariat a l'Energie Atomique
- 当前专利权人： Commissariat a l'Energie Atomique
- 当前专利权人地址： FR Paris
- 代理机构： Pearne & Gordon LLP
- 优先权： FR0651210 20060405
- 国际申请： PCT/EP2007/053244 WO 20070403
- 国际公布： WO2007/113300 WO 20071011
- 主分类号： H01L21/322
- IPC分类号： H01L21/322
摘要：
The invention relates to a method for protecting the interior of at least one cavity (4) having a portion of interest (5) and opening onto a face of a microstructured element (1), consisting of depositing, on said face, a nonconformal layer (6) of a protective material, in which said nonconformal layer closes off the cavity without covering the portion of interest.The invention also relates to a method for producing a device comprising such a microstructured element.
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