Invention Grant
US08158453B2 Methods of forming silicide strapping in imager transfer gate device
有权
在成像器传输门装置中形成硅化物带的方法
- Patent Title: Methods of forming silicide strapping in imager transfer gate device
- Patent Title (中): 在成像器传输门装置中形成硅化物带的方法
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Application No.: US12699419Application Date: 2010-02-03
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Publication No.: US08158453B2Publication Date: 2012-04-17
- Inventor: James W. Adkisson , John J. Ellis-Monaghan , R. Michael Guidash , Mark D. Jaffe , Edward T. Nelson , Richard J. Rassel , Charles V. Stancampiano
- Applicant: James W. Adkisson , John J. Ellis-Monaghan , R. Michael Guidash , Mark D. Jaffe , Edward T. Nelson , Richard J. Rassel , Charles V. Stancampiano
- Applicant Address: US NY Armonk US CA Santa Clara
- Assignee: International Business Machines Corporation,Omnivision Technologies, Inc.
- Current Assignee: International Business Machines Corporation,Omnivision Technologies, Inc.
- Current Assignee Address: US NY Armonk US CA Santa Clara
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A CMOS active pixel sensor (APS) cell structure having dual workfunction transfer gate device and method of fabrication. The transfer gate device comprises a dielectric layer formed on a substrate and a dual workfunction gate conductor layer formed on the dielectric layer comprising a first conductivity type doped region and an abutting second conductivity type doped region. The transfer gate device defines a channel region where charge accumulated by a photosensing device is transferred to a diffusion region. A silicide structure is formed atop the dual workfunction gate conductor layer for electrically coupling the first and second conductivity type doped regions. In one embodiment, the silicide contact is smaller in area dimension than an area dimension of said dual workfunction gate conductor layer. Presence of the silicide strap prevents the diodic behavior from allowing one or the other side of the gate to float to an indeterminate voltage.
Public/Granted literature
- US20100136733A1 SILICIDE STRAPPING IN IMAGER TRANSFER GATE DEVICE Public/Granted day:2010-06-03
Information query
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